Investigation and reduction of RF loss induced by Al diffusion at the AlN/Si(111) interface in GaN-based HEMT buffer stacks

Mauder, C. (Corresponding author); Hahn, Klaus Matthias; Marx, M.; Gao, Z.; Oligschlaeger, R.; Zweipfennig, Thorsten; Noculak, Achim; Negra, Renato; Kalisch, Holger; Vescan, Andrei; Heuken, Michael

Bristol : IOP Publ. (2021)
Journal Article

In: Semiconductor science and technology
Volume: 36
Issue: 7
Page(s)/Article-Nr.: 075008